JPH0241114U - - Google Patents
Info
- Publication number
- JPH0241114U JPH0241114U JP11951788U JP11951788U JPH0241114U JP H0241114 U JPH0241114 U JP H0241114U JP 11951788 U JP11951788 U JP 11951788U JP 11951788 U JP11951788 U JP 11951788U JP H0241114 U JPH0241114 U JP H0241114U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film thickness
- sensor
- support jig
- books
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 3
- 238000000691 measurement method Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 1
Landscapes
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11951788U JPH0632568Y2 (ja) | 1988-09-12 | 1988-09-12 | センサ支え治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11951788U JPH0632568Y2 (ja) | 1988-09-12 | 1988-09-12 | センサ支え治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0241114U true JPH0241114U (en]) | 1990-03-22 |
| JPH0632568Y2 JPH0632568Y2 (ja) | 1994-08-24 |
Family
ID=31364818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11951788U Expired - Lifetime JPH0632568Y2 (ja) | 1988-09-12 | 1988-09-12 | センサ支え治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632568Y2 (en]) |
-
1988
- 1988-09-12 JP JP11951788U patent/JPH0632568Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0632568Y2 (ja) | 1994-08-24 |